Title:
【考案の名称】熱処理装置
Document Type and Number:
Japanese Patent JP2578567
Kind Code:
Y2
Inventors:
Koichi Taniyama
Application Number:
JP3332791U
Publication Date:
August 13, 1998
Filing Date:
April 15, 1991
Export Citation:
Assignee:
Fukui Shinetsu Quartz Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
H01L21/324; H01L21/22; (IPC1-7): H01L21/324; H01L21/22
Domestic Patent References:
| JP5265662A |
Attorney, Agent or Firm:
Masahisa Takahashi (1 person outside)