Title:
【発明の名称】荷電粒子発生装置
Document Type and Number:
Japanese Patent JP2579912
Kind Code:
B2
Inventors:
KAN FUMITAKA
HAYAKAWA NAOJI
TAKENOCHI MASANORI
NAKAMURA KENJI
AGARI YASUO
HAKAMATA ISAO
HAYAKAWA NAOJI
TAKENOCHI MASANORI
NAKAMURA KENJI
AGARI YASUO
HAKAMATA ISAO
Application Number:
JP18273886A
Publication Date:
February 12, 1997
Filing Date:
August 05, 1986
Export Citation:
Assignee:
CANON KK
International Classes:
H01J27/08; H01J1/30; H01J1/308; H01J27/20; H01J37/06; H01J37/08; (IPC1-7): H01J37/06; H01J1/30; H01J27/20; H01J37/08
Domestic Patent References:
| JP57187849A | ||||
| JP5615529A | ||||
| JP5698827A |
Attorney, Agent or Firm:
Yoshikazu Tani