Title:
【発明の名称】ICデバイスの試験・測定装置
Document Type and Number:
Japanese Patent JP2580828
Kind Code:
B2
Abstract:
PURPOSE:To reduce the number of sensors to be provided at respective measuring positions as small as possible in an apparatus having many stages of measuring positions for concurrently testing and measuring a plurality of devices by disposing sensors for detecting the passage and stoppage of IC devices at odd stages of the positions as seen from an upstream side of running direction of the IC device. CONSTITUTION:An apparatus for testing and measuring an IC device DV by providing a plurality of stages of measuring positions 21a-21d at running route of an IC device DV, and bringing into contact with test heads 41a-41d of an IC tester 40 in a state that the devices DV are positioned at the positions 21a-21d is composed by disposing sensors 28, 29 for detecting the passage and stoppage of the device DV at odd stages of the position as seen from the upstream side of the running direction of the device DV at the measuring positions 21a-21d of the respective stages. For example, the sensors 28, 29 not only merely detect the presence or absence of the device DV, but also detect whether the device DV passes the disposing positions of the sensors 28, 29 or not.
Inventors:
OKITSU HIKARI
Application Number:
JP7709090A
Publication Date:
February 12, 1997
Filing Date:
March 28, 1990
Export Citation:
Assignee:
HITACHI ELECTR ENG
International Classes:
G01V8/20; G06M9/00; H01L21/66; H01L21/67; H01L21/68; G01R31/26; (IPC1-7): H01L21/66; G01R31/26; G01V8/20; G06M9/00; H01L21/68
Domestic Patent References:
| JP385584U |
Attorney, Agent or Firm:
Shunji Kagei