Title:
【発明の名称】焦電型赤外線検出器およびその製造方法
Document Type and Number:
Japanese Patent JP2584124
Kind Code:
B2
Abstract:
PURPOSE:To obtain a small size pyroelectric infrared detector having a high yield by bonding an organic thin film on a substrate and then providing a pyroelectric element thereon. CONSTITUTION:A pyroelectric element 12 is produced on a first substrate 11 and the entire surface is covered with an organic thin film 14. A second bustrate 16 having holes is bonded thereon and the first substrate 11 is removed by the etching. Thereby, the pyroelectric element 18 is supported within the holes of the second substrate 15. Various substrate materials can be obtained by bonding the substrate 16 having the holes and the pyroelectric element 12 coated with the organic thin film 14. For instance, a device as a whole can be formed in small size by using a material such as glass epoxy used for circuit board and manufacturing a detector and peripheral circuits on the same substrate. Thereby, a small size pyroelectric infrared detector having high yield can be obtained. Moreover, manufacturing process can be simplified and manufacturing period can also be shortened.
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Inventors:
TOMITA YOSHIHIRO
TAKAYAMA RYOICHI
TAKAYAMA RYOICHI
Application Number:
JP29800290A
Publication Date:
February 19, 1997
Filing Date:
November 01, 1990
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01J1/02; G01J5/02; G01J5/34; H01L37/00; H01L37/02; (IPC1-7): H01L37/02; G01J1/02; G01J5/02
Domestic Patent References:
| JP63313023A | ||||
| JP57104380A |
Attorney, Agent or Firm:
Tomoyuki Takimoto