Title:
【発明の名称】ポジ型フオトレジスト組成物
Document Type and Number:
Japanese Patent JP2584226
Kind Code:
B2
Inventors:
YAJIMA MIKIO
KAWADA MASAJI
KAWADA MASAJI
Application Number:
JP9521087A
Publication Date:
February 26, 1997
Filing Date:
April 20, 1987
Export Citation:
Assignee:
NIPPON ZEON CO
International Classes:
G03C1/72; G03F7/004; G03F7/022; H01L21/027; H01L21/30; (IPC1-7): G03F7/022; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Keiji Matsunaga