【発明の名称】半導体ウエーハの位置決め装置

Title:

【発明の名称】半導体ウエーハの位置決め装置

Document Type and Number:

Japanese Patent JP2587525

Kind Code:

B2

Inventors:

HASEGAWA KYOSHI
HASHIZUME HIDEHISA
YAMASHITA KEIZO
NAKAI YASUHIDE

Application Number:

JP20473890A

Publication Date:

March 05, 1997

Filing Date:

July 31, 1990

Export Citation:

Assignee:

KOBE STEEL LTD

International Classes:

H01L21/68; B23Q3/18; H01L21/027; H01L21/30; H01L21/66; H01L21/683; (IPC1-7): H01L21/68; B23Q3/18; H01L21/027; H01L21/66

Attorney, Agent or Firm:

Akeda Kan

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