Title:
【発明の名称】半導体ウェ-ハ裏面の清浄化方法
Document Type and Number:
Japanese Patent JP2587943
Kind Code:
B2
Inventors:
SANO YOSHIKAZU
Application Number:
JP17887487A
Publication Date:
March 05, 1997
Filing Date:
July 20, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01L21/30; H01L21/027; H01L21/304; (IPC1-7): H01L21/304; H01L21/027
Domestic Patent References:
| JP61226750A | ||||
| JP58182827A |
Attorney, Agent or Firm:
Matsumura Hiroshi