Title:
【発明の名称】薄膜形成装置
Document Type and Number:
Japanese Patent JP2587945
Kind Code:
B2
Inventors:
KAWAMURA KAZUNORI
TSUMURA AKIO
TSUMURA AKIO
Application Number:
JP19480687A
Publication Date:
March 05, 1997
Filing Date:
August 04, 1987
Export Citation:
Assignee:
NITTO DENKO CORP
International Classes:
C23C14/06; C23C14/08; C23C14/34; C23C14/54; (IPC1-7): C23C14/54; C23C14/34
Domestic Patent References:
| JP60258461A | ||||
| JP6137964A | ||||
| JP6111671A |
Attorney, Agent or Firm:
Koji Onishi