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Patent Searching and Data


Title:
【発明の名称】薄膜形成方法
Document Type and Number:
Japanese Patent JP2590534
Kind Code:
B2
Inventors:
KAMACHI HIDEKI
ARAKI MAKOTO
Application Number:
JP15622088A
Publication Date:
March 12, 1997
Filing Date:
June 23, 1988
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
C23C16/50; (IPC1-7): C23C16/50
Domestic Patent References:
JP6431976A
JP6418990A
JP6247483A
JP62174382A
JP62238371A
Attorney, Agent or Firm:
井桁 貞一