Title:
【発明の名称】ガスレーザ装置
Document Type and Number:
Japanese Patent JP2593156
Kind Code:
B2
Abstract:
A gas laser for producing laser oscillation by circulating a laser gas. The gas laser comprises a laser gas supply device (5), a gas supply valve (6) provided at an outlet of the laser gas supply device, an exhaust device (9) for exhausting the laser gas in a discharge tube (1), a pressure sensor (7) for detecting the pressure in the discharge tube (1), and a controller (10). While the gas laser is not in operation, the controller (10) detects the decrease of pressure in the discharge tube (1) relying upon the pressure sensor (7), opens the gas supply valve (6) and fills the discharge tube (1) with the laser gas up to a predetermined pressure. When the laser is not in operation, therefore, the discharge tube is automatically filed with the laser gas up to the predetermined pressure, such that the pressure in the discharge tube (1) is maintained to be higher than that of the gear box (4a) at all times preventing the oil in the gear box (4a) from entering the discharge tube (1). ABSTRACT A gas laser device for effecting a laser oscillation while circulating a laser gas therein includes a laser gas supply unit (5), a gas supply valve (6) arranged at an outlet of the laser gas supply unit, an exhaust unit (9) for exhausting the laser gas from a discharge tube (1), a pressure sensor (7) for detecting the pressure in the discharge tube (1), and a control apparatus (10). The control apparatus (10) detects a pressure drop in the discharge tube (1) by the pressure sensor (7) and opens the gas supply valve (6) to fill the discharge tube (1) with the laser gas to a predetermined pressure level when an operation of the gas laser device is stopped. Accordingly, when the operation of the gas laser device is stopped, the discharge tube, etc., are automatically filled with the laser gas to the predetermined pressure level, and thus the pressure in the discharge tube (1) is always higher than the pressure in a gearbox (4a), to thereby prevent the oil in the gearbox (4a) from entering the discharge tube (1).
Inventors:
Nobuaki Ieku
Application Number:
JP16929787A
Publication Date:
March 26, 1997
Filing Date:
July 07, 1987
Export Citation:
Assignee:
FANUC Corporation
International Classes:
B23K26/00; H01S3/036; H01S3/097; H01S3/134; (IPC1-7): H01S3/134; B23K26/00; H01S3/097
Domestic Patent References:
| JP60214577A | ||||
| JP5992586A | ||||
| JP5968982A |
Attorney, Agent or Firm:
Hattori Takeshi