Title:
【発明の名称】投影光学装置及びこの投影光学装置を用いた投影露光装置
Document Type and Number:
Japanese Patent JP2593825
Kind Code:
B2
Inventors:
Suzuki Shigeru
Application Number:
JP7593788A
Publication Date:
March 26, 1997
Filing Date:
March 31, 1988
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/30; G03F7/20; H01L21/027; H05K3/00; (IPC1-7): G03F7/20; H01L21/027; H05K3/00
Attorney, Agent or Firm:
Takaharu Takita