Title:
【考案の名称】気相成長装置
Document Type and Number:
Japanese Patent JP2596693
Kind Code:
Y2
Inventors:
Lifestyle Eitoku
Isao Matsumoto
Ryuichi Ogawa
Isao Matsumoto
Ryuichi Ogawa
Application Number:
JP1547093U
Publication Date:
June 21, 1999
Filing Date:
March 30, 1993
Export Citation:
Assignee:
Nippon Oxygen Co., Ltd.
International Classes:
H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/31
Domestic Patent References:
| JP4134838U | ||||
| JP5868957U |
Attorney, Agent or Firm:
Kazuhiko Kido (1 person outside)
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