Title:
【発明の名称】絶縁膜の水分透過性管理方法
Document Type and Number:
Japanese Patent JP2599486
Kind Code:
B2
Inventors:
Takuma Fujiwara
Application Number:
JP16718490A
Publication Date:
April 09, 1997
Filing Date:
June 25, 1990
Export Citation:
Assignee:
Matsushita Electronics Industrial Co., Ltd.
International Classes:
H01L21/31; G01M3/00; G01N1/36; H01L21/318; H01L21/66; (IPC1-7): H01L21/66; G01M3/00; G01N1/36; H01L21/31; H01L21/318
Domestic Patent References:
| JP60140729A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)