Title:
【考案の名称】可動部の故障または寿命を表示するオートハンドラ
Document Type and Number:
Japanese Patent JP2600443
Kind Code:
Y2
Inventors:
Hiroto Uchiyama
Toda English
Toda English
Application Number:
JP2683193U
Publication Date:
October 12, 1999
Filing Date:
April 23, 1993
Export Citation:
Assignee:
Ando Electric Co., Ltd.
International Classes:
G01M99/00; G01R31/26; G06Q50/00; G06Q50/04; H01L21/66; (IPC1-7): G01M19/00; G01R31/26; G06F17/60; H01L21/66