Title:
【考案の名称】ICチップの検査装置、検査接続構造、及びこれに用いられる異方導電性フィルムないしシート
Document Type and Number:
Japanese Patent JP2602654
Kind Code:
Y2
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Inventors:
Katsuhisa Aizawa
Osami Hayashi
Osami Hayashi
Application Number:
JP193698U
Publication Date:
January 24, 2000
Filing Date:
March 30, 1998
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JP2301979A | ||||
| JP63263483A | ||||
| JP2243974A | ||||
| JP63109674U |
Attorney, Agent or Firm:
Ryoichi Yamamoto (2 outside)