Title:
【考案の名称】真空処理装置用気密シールパッキン
Document Type and Number:
Japanese Patent JP2606998
Kind Code:
Y2
Inventors:
Kazuhiro Sakonaka
Application Number:
JP10770491U
Publication Date:
February 19, 2001
Filing Date:
December 27, 1991
Export Citation:
Assignee:
Tabai Espec Co., Ltd.
International Classes:
F16J15/10; (IPC1-7): F16J15/10
Domestic Patent References:
| JP63178665U | ||||
| JP5671888U |
Attorney, Agent or Firm:
Masao Tanikawa