Title:
【発明の名称】半導体圧力センサ
Document Type and Number:
Japanese Patent JP2611330
Kind Code:
B2
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Inventors:
Norihiro Kato
Application Number:
JP11769088A
Publication Date:
May 21, 1997
Filing Date:
May 13, 1988
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Domestic Patent References:
| JP6312178A | ||||
| JP496972A |
Attorney, Agent or Firm:
Hiroshi Okawa