Title:
【発明の名称】レジストパターン付基材の表面処理方法
Document Type and Number:
Japanese Patent JP2612623
Kind Code:
B2
Inventors:
Inamoto Tadayoshi
Application Number:
JP32275089A
Publication Date:
May 21, 1997
Filing Date:
December 14, 1989
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/16; G03F7/40; (IPC1-7): G03F7/40; B41J2/16
Domestic Patent References:
| JP61154947A | ||||
| JP258062A | ||||
| JP1217915A |
Attorney, Agent or Firm:
Wakabayashi Tadashi