Title:
【発明の名称】ペレツトボンデイング方法及び装置
Document Type and Number:
Japanese Patent JP2612700
Kind Code:
B2
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Inventors:
Yuichi Sato
Application Number:
JP9576287A
Publication Date:
May 21, 1997
Filing Date:
April 17, 1987
Export Citation:
Assignee:
Toshiba Mechatronics Co., Ltd.
International Classes:
H01L21/52; (IPC1-7): H01L21/52
Domestic Patent References:
| JP6235526A | ||||
| JP57210636A | ||||
| JP61163646A |