Title:
【発明の名称】単結晶の育成装置
Document Type and Number:
Japanese Patent JP2612897
Kind Code:
B2
Inventors:
Namikawa Yasuo
Shinichi Sawada
Masami Ryumi
Shinichi Sawada
Masami Ryumi
Application Number:
JP9335988A
Publication Date:
May 21, 1997
Filing Date:
April 18, 1988
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/208; C30B11/00; (IPC1-7): C30B11/00; H01L21/208
Attorney, Agent or Firm:
Akira Uchida (3 outside)