Title:
【発明の名称】粘性流体塗布装置
Document Type and Number:
Japanese Patent JP2612899
Kind Code:
B2
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Inventors:
Fujiwara Soura
Makoto Seno
Kazuo Nagae
Makoto Seno
Kazuo Nagae
Application Number:
JP14010488A
Publication Date:
May 21, 1997
Filing Date:
June 06, 1988
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B05C5/00; H01L21/52; H05K3/34; (IPC1-7): B05C5/00
Domestic Patent References:
| JP1135561A |
Attorney, Agent or Firm:
Kazuko Oshima