Title:
【発明の名称】積層型圧電アクチュエータ素子の製造方法
Document Type and Number:
Japanese Patent JP2623960
Kind Code:
B2
Abstract:
PURPOSE:To obtain an element having a high reliability by giving a heat treatment in a dry atmosphere after cutting the element, removing a residual stress inside a glass insulation material, repairing any defect in the glass insulation material and removing the residue of lubricating oil and a cleaning solution used during element cutting. CONSTITUTION:Powder of piezoelectric ceramic is mixed with a solvent, an electrode paste is printed on a formed ceramic sheet thereby forming an internal electrode, and 130 sheets thus formed are stacked and pressed to form a multilayered body. Then, the pressed body is baked for 2 hours at 1120 deg.C to form a sintered body and it is cut to strip-shaped blocks. Then, glass insulating bodies 5 are attached to every other internal electrode 3 one side of the block. Also, on another side glass insulating bodies 5 are similarly attached. Thereafter, external electrodes 6 are attached to the two sides, and the block 4 is cut to individual pieces by a multi-wire saw. Moreover, the cut pieces are heat-treated for 10 minutes at 400 deg.C, lead wires 7 are soldered to the external electrodes 6, and coating resin is electrostatically coated and the element 8 is completed.
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Inventors:
Yoshihiro Goto
Application Number:
JP30766290A
Publication Date:
June 25, 1997
Filing Date:
November 14, 1990
Export Citation:
Assignee:
NEC
International Classes:
H01L41/083; H01L41/09; H01L41/22; (IPC1-7): H01L41/083; H01L41/22
Domestic Patent References:
| JP3280479A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)