Title:
【発明の名称】縦型熱処理装置
Document Type and Number:
Japanese Patent JP2628342
Kind Code:
B2
Inventors:
Shingo Watanabe
Kato Mitsuo
Kato Mitsuo
Application Number:
JP12332188A
Publication Date:
July 09, 1997
Filing Date:
May 20, 1988
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/22; H01L21/68; (IPC1-7): H01L21/22; H01L21/68
Domestic Patent References:
| JP6276615A | ||||
| JP6329943U | ||||
| JP6291439U | ||||
| JP61179749U |
Attorney, Agent or Firm:
Moriya Kazuo