Title:
【発明の名称】半導体素子特性評価用の直交格子点の発生方法
Document Type and Number:
Japanese Patent JP2635617
Kind Code:
B2
Abstract:
A method of generating a discretization grid for a finite-difference simulation capable of simulating an object with a complex cross-sectional configuration accurately is disclosed. The method includes the step of generating grid through each vertex of the polygonal figure representing the cross-sectional configuration, and the step of generating additional grid through each intersection of the grid and the segments of the polygonal figure not parallel to the grid.
Inventors:
WADA TETSUNORI
OOSAWA SHINJI
OOSAWA SHINJI
Application Number:
JP24258587A
Publication Date:
July 30, 1997
Filing Date:
September 29, 1987
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G01R31/26; G06F17/50; H01L21/66; (IPC1-7): G01R31/26; G06F17/50; H01L21/66
Domestic Patent References:
| JP1198044A | ||||
| JP649633A | ||||
| JP63313278A | ||||
| JP6412373A |
Attorney, Agent or Firm:
Yasuo Miyoshi (1 outside)