Title:
【発明の名称】超電導素子および作製方法
Document Type and Number:
Japanese Patent JP2641966
Kind Code:
B2
Abstract:
PURPOSE:To unnecessitate fine work technique, stabilize element performance, and improve reliability, by a method wherein a thinned part on the protruding part of a substrate, of an oxide superconducting thin film formed on the substrate provided with the protruding part, is made a superconducting channel. CONSTITUTION:A protruding part is formed on a substrate 5; a part of the substrate 5 is covered with photo resist 8; the surface is shaved by a dry etching method, and a protruding part 50 is formed. An oxide superconducting film is formed on the substrate 5, and a superconducting layer 1 is formed. The surface of said layer 1 is flattened, and the upper part of the protruding part 50 of the substrate 5 is thinly worked as follows; the superconducting layer 1 is so coated with photo resist 9 that the surface becomes flat, and the superconducting layer 1 is flattened by ion etching or the like until the thickness of a superconducting channel 10 on the protruding part 50 becomes 5nm. Next an insulating film 6 and a metal film 7 are laminated on the superconducting layer 1. Said laminated films are eliminated by etching, in the manner in which only the part on the superconducting channel 10 is left, and a gate electrode 4 is formed. Finally a source electrode 2 and a drain electrode 3 are formed on both sides of the gate electrode 4, thereby completing an element.
Inventors:
NAKAMURA TAKAO
INADA HIROSHI
IIYAMA MICHITOMO
INADA HIROSHI
IIYAMA MICHITOMO
Application Number:
JP23653490A
Publication Date:
August 20, 1997
Filing Date:
September 06, 1990
Export Citation:
Assignee:
SUMITOMO DENKI KOGYO KK
International Classes:
H01L29/78; H01L39/22; H01L39/24; (IPC1-7): H01L39/22; H01L39/24
Domestic Patent References:
| JP2234479A |
Attorney, Agent or Firm:
Keiko Okabe