Title:
【発明の名称】真空チャックの吸着板
Document Type and Number:
Japanese Patent JP2651354
Kind Code:
B2
More Like This:
Inventors:
UCHIDA KOJI
Application Number:
JP18026594A
Publication Date:
September 10, 1997
Filing Date:
August 01, 1994
Export Citation:
Assignee:
SHII KEE DEI KK
International Classes:
B23Q3/08; C08J9/24; H01L21/68; H01L21/683; (IPC1-7): B23Q3/08; H01L21/68
Domestic Patent References:
| JP5856441U | ||||
| JP5948050U |
Attorney, Agent or Firm:
Hironobu Onda