Title:
【発明の名称】超格子構造を有する強誘電体薄膜及び該薄膜を備える赤外線センサ・圧力センサ
Document Type and Number:
Japanese Patent JP2651784
Kind Code:
B2
Abstract:
PURPOSE:To make it possible to generate the pressure due to lattice pressure in the in-plane direction of thin film surface and artificially increase the displacement of stationary position of constituent ions by alternately laminating ferroelectric substances having different lattice constants. CONSTITUTION:Excimer laser beam 6 oscillated from a laser oscillation 2 is introduced through a lens 7 and a laser inlet 8 into a film-forming vessel 1 and irradiated into a target 3. Then, laser beam 6 is alternately irradiated into two or more kinds of ferroelectric substances A and B provided in the target 3 and excited seeds produced from the target 3 is deposited onto a substrate 4 to form the objective ferroelectric thin film having superlattice structure with two or more kinds of different lattice constants.
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Inventors:
TABATA HITOSHI
MURATA OSAMU
MURATA OSAMU
Application Number:
JP17493393A
Publication Date:
September 10, 1997
Filing Date:
June 22, 1993
Export Citation:
Assignee:
KAWASAKI JUKOGYO KK
International Classes:
C23C14/08; C30B29/30; C30B29/32; C30B29/68; G01J1/02; H01B3/00; H01B3/12; H01L37/02; H01L41/08; (IPC1-7): C30B29/68; C23C14/08; C30B29/30; C30B29/32; G01J1/02; H01B3/00; H01B3/12; H01L37/02; H01L41/08
Domestic Patent References:
| JP5221800A |
Attorney, Agent or Firm:
Shinichi Shiode