Title:
▲ＩＩ▼−▲ＶＩ▼族化合物結晶物品およびその形成方法
Document Type and Number:
Japanese Patent JP2659746
Kind Code:
B2
Inventors:
TOKUNAGA HIROYUKI
YONEHARA TAKAO
YONEHARA TAKAO
Application Number:
JP7279288A
Publication Date:
September 30, 1997
Filing Date:
March 26, 1988
Export Citation:
Assignee:
KYANON KK
International Classes:
H01L21/365; H01L21/36; H01L21/84; (IPC1-7): H01L21/36; H01L21/365; H01L21/84
Attorney, Agent or Firm:
谷 義一