Title:
【発明の名称】ダイアフラムと加速度センサ
Document Type and Number:
Japanese Patent JP2662498
Kind Code:
B2
Inventors:
KAWAKAMI TAKAHIRO
OGAWA AKIRA
ICHIMURA ETSUO
OGAWA AKIRA
ICHIMURA ETSUO
Application Number:
JP33608393A
Publication Date:
October 15, 1997
Filing Date:
December 28, 1993
Export Citation:
Assignee:
KANSEI KK
International Classes:
G01P21/00; F16J3/02; G01L7/08; G01L9/00; G01P15/08; G01P15/12; (IPC1-7): G01P15/12; F16J3/02; G01P21/00
Domestic Patent References:
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| JP4181170A | ||||
| JP3162676A | ||||
| JP5052621A | ||||
| JP63225706A | ||||
| JP5187548A | ||||
| JP2195082A | ||||
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Attorney, Agent or Firm:
Tamio Nishiwaki