Title:
【発明の名称】露光焼付装置用光源ユニット
Document Type and Number:
Japanese Patent JP2668271
Kind Code:
B2
Inventors:
Minoru Watanuki
Shintoku Daiji
Shintoku Daiji
Application Number:
JP29031789A
Publication Date:
October 27, 1997
Filing Date:
November 08, 1989
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
G03F7/20; G03B27/32; G03B27/52; G03B27/54; H05K3/00; (IPC1-7): G03B27/52; G03B27/54
Domestic Patent References:
| JP6390129A | ||||
| JP60186829A |
Attorney, Agent or Firm:
Dozo Isono