Title:
【発明の名称】研磨装置および研磨方法
Document Type and Number:
Japanese Patent JP2668273
Kind Code:
B2
Inventors:
Takatoshi Takemoto
Kawashima Issei
Kawashima Issei
Application Number:
JP31976389A
Publication Date:
October 27, 1997
Filing Date:
December 08, 1989
Export Citation:
Assignee:
Ace Denken Co., Ltd.
International Classes:
A63F7/02; B24B21/16; B24B21/18; (IPC1-7): A63F7/02; B24B21/16; B24B21/18
Attorney, Agent or Firm:
Kenji Kashihara