Title:
【発明の名称】スパッタリングターゲット
Document Type and Number:
Japanese Patent JP2670295
Kind Code:
B2
Inventors:
Kawai Mitsuo
Application Number:
JP10271188A
Publication Date:
October 29, 1997
Filing Date:
April 27, 1988
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C23C14/34; C22C27/02; C22C27/04; C23C14/14; (IPC1-7): C23C14/14; C23C14/34
Attorney, Agent or Firm:
Hideaki Tokawa (1 outside)