Title:
【発明の名称】マトリクスフレームのディゲート方法
Document Type and Number:
Japanese Patent JP2675417
Kind Code:
B2
Inventors:
Takashi Kobayashi
Morimura Masahiro
Morimura Masahiro
Application Number:
JP32319889A
Publication Date:
November 12, 1997
Filing Date:
December 13, 1989
Export Citation:
Assignee:
Apic Yamada Corporation
International Classes:
H01L21/56; B29C45/38; (IPC1-7): H01L21/56
Domestic Patent References:
| JP2252514A |
Attorney, Agent or Firm:
Takao Watanuki (1 outside)