Title:
【発明の名称】薄膜精密加工用のYAGレーザ加工機
Document Type and Number:
Japanese Patent JP2677711
Kind Code:
B2
Abstract:
PURPOSE: To stably machine a workpiece to be machined even when a moving speed of the workpiece to be machined is varied by preparing an aperture means and a shutter means in an optical system and controlling the pulse irradiation of laser beams based on each data of an XY table. CONSTITUTION: A spot diameter of a spot formed via a condensing lens is made to be smaller by thinning a diameter of laser beams B with an aperture means 13 provided between lenses in an optical system. The irradiation of the laser beams B to a workpiece to be machined is controlled with a shutter means 14 and precise machining is stabilized. An XY table is provided with a controller over the laser beams B, and the movement of the XY table 3 is detected with a linear encoder and a rotary encoder. A theoretical value is obtained with an OR circuit 27 with respect to each data relating to a detected X movement and Y movement, and the output is inputted into a laser irradiation control circuit 29 via a (n) times circuit 28. Moreover, the aperture means 13 and the shutter means 14 are arranged between a convex lens for parallelizing and a convex lens 24 for converging.
Inventors:
Ishiyama Satooka
Application Number:
JP41411890A
Publication Date:
November 17, 1997
Filing Date:
December 26, 1990
Export Citation:
Assignee:
Fine Machining Co., Ltd.
Jeviev Inc.
Jeviev Inc.
International Classes:
B23K26/08; B23K26/00; B23K26/06; B23K26/073; G02B9/58; G02B26/02; G03F7/20; H01L21/027; H01L21/30; H01S3/109; H01S3/11; (IPC1-7): B23K26/00; B23K26/06; B23K26/08; G02B9/58; G02B26/02; H01S3/109; H01S3/11
Attorney, Agent or Firm:
Takeshi Takatsuki