【発明の名称】露光方法 - 株式会社日立製作所

Title:

【発明の名称】露光方法

Document Type and Number:

Japanese Patent JP2677982

Kind Code:

B2

Inventors:

Uto Yukio
Masataka Shiba
Yoshitada Oshida

Application Number:

JP1140196A

Publication Date:

November 17, 1997

Filing Date:

January 26, 1996

Export Citation:

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Assignee:

株式会社日立製作所

International Classes:

G01N21/88; G01N21/94; G01N21/956; G03F7/20; H01L21/027; H01L21/66; H01L21/677; (IPC1-7): H01L21/027; G01N21/88; G03F7/20; H01L21/66; H01L21/68

Domestic Patent References:

JP57120936A
JP5982727A
JP5917248A

Attorney, Agent or Firm:

Akio Takahashi (1 person outside)

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