Title:
【発明の名称】蒸気洗浄装置
Document Type and Number:
Japanese Patent JP2678367
Kind Code:
B2
Inventors:
Hideo Kudo
Application Number:
JP5623988A
Publication Date:
November 17, 1997
Filing Date:
March 11, 1988
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/304; B08B3/08; (IPC1-7): H01L21/304; B08B3/08; H01L21/304
Domestic Patent References:
JP56168072A | ||||
JP6195530A | ||||
JP6166937U |
Attorney, Agent or Firm:
Koichi Tateno