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Patent Searching and Data


Title:
【発明の名称】蒸気洗浄装置
Document Type and Number:
Japanese Patent JP2678367
Kind Code:
B2
Inventors:
Hideo Kudo
Application Number:
JP5623988A
Publication Date:
November 17, 1997
Filing Date:
March 11, 1988
Export Citation:
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Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/304; B08B3/08; (IPC1-7): H01L21/304; B08B3/08; H01L21/304
Domestic Patent References:
JP56168072A
JP6195530A
JP6166937U
Attorney, Agent or Firm:
Koichi Tateno