Title:
【発明の名称】プラズマ気相反応方法
Document Type and Number:
Japanese Patent JP2683692
Kind Code:
B2
Inventors:
Sanpei Yamazaki
Application Number:
JP12757688A
Publication Date:
December 03, 1997
Filing Date:
May 24, 1988
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/768; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): H01L21/768; H01L21/3065; H01L21/31
Domestic Patent References:
| JP61206242A | ||||
| JP6091645A | ||||
| JP59205722A |
Attorney, Agent or Firm:
Kyosuke Kato