【発明の名称】電子装置の作製方法 - Semiconductor Energy Laboratory Co., Ltd.

Title:

【発明の名称】電子装置の作製方法

Document Type and Number:

Japanese Patent JP2683694

Kind Code:

B2

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Inventors:

Sanpei Yamazaki
Urata Kazuo
Koyama

Application Number:

JP26196688A

Publication Date:

December 03, 1997

Filing Date:

October 17, 1988

Export Citation:

Assignee:

Semiconductor Energy Laboratory Co., Ltd.

International Classes:

H01L21/56; H01L23/29; H01L23/31; H01L23/50; (IPC1-7): H01L21/56; H01L23/29; H01L23/31; H01L23/50

Domestic Patent References:

JP61127637A
JP59231840A

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