Title:
【発明の名称】パルスレーザー蒸着法を用いた複合系材料薄膜の製造方法
Document Type and Number:
Japanese Patent JP2687845
Kind Code:
B2
Inventors:
Sadahiko Miura
Tetsuro Sato
Tetsuro Sato
Application Number:
JP17643393A
Publication Date:
December 08, 1997
Filing Date:
July 16, 1993
Export Citation:
Assignee:
NEC
International Classes:
C23C14/28; C30B29/22; H01B13/00; (IPC1-7): C23C14/28
Domestic Patent References:
| JP5271914A | ||||
| JP4202762A | ||||
| JP339464A | ||||
| JP2311307A | ||||
| JP56169228A | ||||
| JP62141061U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)