Title:
【発明の名称】パターンジェネレータ
Document Type and Number:
Japanese Patent JP2690498
Kind Code:
B2
Inventors:
Issei Watanabe
Application Number:
JP9235188A
Publication Date:
December 10, 1997
Filing Date:
April 14, 1988
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP56118340A |
Attorney, Agent or Firm:
Azusa Yuzo