【発明の名称】LCD基板のガス処理装置 - 東京エレクトロン株式会社

Title:

【発明の名称】LCD基板のガス処理装置

Document Type and Number:

Japanese Patent JP2691743

Kind Code:

B2

Inventors:

Yuji Kamikawa
Masafumi Nomura
Yoshioka Kazutoshi

Application Number:

JP22412388A

Publication Date:

December 17, 1997

Filing Date:

September 07, 1988

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/302; H01L21/027; H01L21/30; H01L21/3065; (IPC1-7): H01L21/3065

Domestic Patent References:

Attorney, Agent or Firm:

Suyama Saichi

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