Title:
【発明の名称】現像装置と現像方法
Document Type and Number:
Japanese Patent JP2695215
Kind Code:
B2
Inventors:
Kiyohiro Kawasaki
Application Number:
JP32117988A
Publication Date:
December 24, 1997
Filing Date:
December 20, 1988
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G03D5/04; G03F7/30; (IPC1-7): G03F7/30; G03D5/04
Domestic Patent References:
| JP5772147A | ||||
| JP59232345A | ||||
| JP6236671A |
Attorney, Agent or Firm:
Tomoyuki Takimoto