【発明の名称】単結晶薄膜の形成方法

Title:

【発明の名称】単結晶薄膜の形成方法

Document Type and Number:

Japanese Patent JP2699329

Kind Code:

B2

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Inventors:

Takashi Tomita
Shigeru Kojima
Setsuo Usui

Application Number:

JP24108986A

Publication Date:

January 19, 1998

Filing Date:

October 09, 1986

Export Citation:

Assignee:

ソニー株式会社

International Classes:

H01L21/20; H01L21/263; (IPC1-7): H01L21/20

Domestic Patent References:

Attorney, Agent or Firm:

Hidekuma Matsukuma

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