Title:
【発明の名称】不純物拡散層
Document Type and Number:
Japanese Patent JP2702595
Kind Code:
B2
Inventors:
Yasushi Igarashi
Application Number:
JP21404790A
Publication Date:
January 21, 1998
Filing Date:
August 13, 1990
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
H01L21/22; H01L21/28; (IPC1-7): H01L21/28; H01L21/22
Domestic Patent References:
| JP236525A | ||||
| JP6489446A |
Attorney, Agent or Firm:
Takashi Ogaki