Title:
【発明の名称】単結晶マグネシアスピネル膜の形成方法
Document Type and Number:
Japanese Patent JP2706967
Kind Code:
B2
Inventors:
Eiji Taguchi
Inoue Kyoen
Inoue Kyoen
Application Number:
JP1283489A
Publication Date:
January 28, 1998
Filing Date:
January 20, 1989
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H01L21/205; H01L21/86; (IPC1-7): H01L21/86; H01L21/205
Domestic Patent References:
| JP5791540A | ||||
| JP5926999A |
Attorney, Agent or Firm:
Ryutaro Fujita