【発明の名称】イオンビームの制御方法及びそのために使用するディスプレイ装置

Title:

【発明の名称】イオンビームの制御方法及びそのために使用するディスプレイ装置

Document Type and Number:

Japanese Patent JP2709594

Kind Code:

B2

Abstract:

A display system for use in monitoring ion beam characteristics of an ion beam implantation system. The display includes a cathode ray tube having vertical and horizontal deflection controls. The vertical deflection control is modulated by an indication of ion beam current impinging upon a target wafer. The horizontal deflection control is modulated with a signal related to beam scanning by a deflection electrode. The resultant image provides a system operator with a visual indication of the ion beam.

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Inventors:

Douglas Dane Myron

Application Number:

JP23989787A

Publication Date:

February 04, 1998

Filing Date:

September 24, 1987

Export Citation:

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Assignee:

Eaton Corporation

International Classes:

H01L21/265; H01J37/30; H01J37/317; (IPC1-7): H01J37/317; H01L21/265

Domestic Patent References:

JP61129040A
JP61107647A
JP62202767U

Attorney, Agent or Firm:

Nobuo Kaida (1 person outside)

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