【発明の名称】プラズマ生成装置

Title:

【発明の名称】プラズマ生成装置

Document Type and Number:

Japanese Patent JP2721856

Kind Code:

B2

Inventors:

MATSUOKA SHIGETO
ONO KENICHI
TAKENOCHI YOSHIAKI

Application Number:

JP10416988A

Publication Date:

March 04, 1998

Filing Date:

April 28, 1988

Export Citation:

Assignee:

NIPPON DENSHIN DENWA KK
OOGUSA SHINKU KENKYUSHO JUGEN

International Classes:

C23C14/22; H05H1/30; (IPC1-7): C23C14/22; H05H1/30

Domestic Patent References:

JP61195047U

Attorney, Agent or Firm:

Yoshikazu Tani (1 person outside)

Previous Patent: 印刷等の加工装置

Next Patent: 搬送台車