Title:
【発明の名称】極低温ヘリウム用流量調節バルブ
Document Type and Number:
Japanese Patent JP2732538
Kind Code:
B2
Inventors:
KATO TAKASHI
TADA EISUKE
SHIMAMOTO SUSUMU
NAKAGAWA SHIGETOMO
IWATA AKIRA
YOSHIKAZU MASAO
TADA EISUKE
SHIMAMOTO SUSUMU
NAKAGAWA SHIGETOMO
IWATA AKIRA
YOSHIKAZU MASAO
Application Number:
JP22226989A
Publication Date:
March 30, 1998
Filing Date:
August 29, 1989
Export Citation:
Assignee:
NIPPON GENSHIRYOKU KENKYUSHO
KAWASAKI JUKOGYO KK
KAWASAKI JUKOGYO KK
International Classes:
G05D7/00; (IPC1-7): G05D7/00
Domestic Patent References:
| JP63220048A | ||||
| JP51102226A | ||||
| JP5965318A | ||||
| JP1121660A | ||||
| JP6472927A |
Attorney, Agent or Firm:
Jun Tsuda (3 others)