Title:
【発明の名称】熱処理炉装置
Document Type and Number:
Japanese Patent JP2740783
Kind Code:
B2
Inventors:
Yuu Shiratani
Hiroshi Sekizuka
Hiroshi Sekizuka
Application Number:
JP29999289A
Publication Date:
April 15, 1998
Filing Date:
November 17, 1989
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/324; H01L21/205; H01L21/22; H01L21/677; H01L21/68; (IPC1-7): H01L21/22; H01L21/205; H01L21/324; H01L21/68
Domestic Patent References:
| JP6155335U |
Attorney, Agent or Firm:
Hajime Inoue (2 outside)