Title:
【発明の名称】レジスト塗布装置
Document Type and Number:
Japanese Patent JP2740805
Kind Code:
B2
Inventors:
Hirasawa Masakatsu
Nakajima Satoshi
Nakajima Satoshi
Application Number:
JP30271388A
Publication Date:
April 15, 1998
Filing Date:
November 30, 1988
Export Citation:
Assignee:
東京エレクトロン株式会社
東京エレクトロン九州株式会社
東京エレクトロン九州株式会社
International Classes:
G03F7/16; B05C11/08; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; B05C11/08; G03F7/16
Domestic Patent References:
| JP62216602A | ||||
| JP62174635U |
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)